Inductively coupled plasma sources from Plasma ALD, LLC.


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Sammy W. Verbruggen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sammy W. Verbruggen returned 1 record(s).

NumberTitle
1Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing