Klaus J. Weber Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Klaus J. Weber returned 2 record(s).

Number	Title
1	Investigation of field-effect passivation and interface state parameters at the Al₂O₃/Si interface
2	Degradation of the surface passivation of plasma-assisted ALD Al₂O₃ under damp-heat exposure