Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Andrea Illiberi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrea Illiberi returned 2 record(s).

NumberTitle
1Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
2Atmospheric pressure plasma enhanced spatial ALD of silver