Inductively coupled plasma sources from Plasma ALD, LLC.


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Nick Singh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nick Singh returned 2 record(s).

NumberTitle
1Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
2Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor