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F. Einsele Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by F. Einsele returned 2 record(s).

NumberTitle
1Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
2Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon