Custom Direct Inductively Coupled Plasma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Direct Inductively Coupled Plasma hardware returned 3 records.

Number	Title
1	Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
2	Selective composition modification deposition utilizing ion bombardment-induced interfacial mixing during plasma-enhanced atomic layer deposition
3	Low-energy high-flux ion bombardment-induced interfacial mixing during Al₂O₃ plasma-enhanced atomic layer deposition