Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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ASM Pulsar 3000 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Pulsar 3000 hardware returned 2 records.

NumberTitle
1Pyroelectric and Ferroelectric Properties of Hafnium Oxide Doped with Si via Plasma Enhanced ALD
2Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing