Leintech LTSR-150 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Leintech LTSR-150 hardware returned 2 records.

Number	Title
1	Al₂O₃/TiO₂ Nanolaminate Thin Film Encapsulation for Organic Thin Film Transistors via Plasma-Enhanced Atomic Layer Deposition
2	Advanced thin gas barriers film incorporating alternating structure of PEALD-based Al₂O₃/organic-inorganic nanohybrid layers