Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Applied Materials P-5000 Mark II Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Applied Materials P-5000 Mark II hardware returned 1 records.

NumberTitle
1Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition