SNTEK Co. ALD 5008 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using SNTEK Co. ALD 5008 hardware returned 5 records.

Number	Title
1	Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
2	Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
3	In situ surface cleaning on a Ge substrate using TMA and MgCp₂ for HfO₂-based gate oxides
4	Very high frequency plasma reactant for atomic layer deposition
5	Low-temperature atomic layer deposition of TiO₂, Al₂O₃,and ZnO thin films