Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Ti Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ti films returned 2 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
2Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition