HfLaO_x Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfLaO_x films returned 6 record(s).

Number	Title
1	Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
2	Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
3	Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
4	Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
5	Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
6	Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition