Inductively coupled plasma sources from Plasma ALD, LLC.


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Sn:TiO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Sn:TiO2 films returned 1 record(s).

NumberTitle
1Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition