Li₂CO₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Li₂CO₃ films returned 3 record(s).

Number	Title
1	Mass Spectrometry Study of Li₂CO₃ Film Growth by Thermal and Plasma-Assisted Atomic Layer Deposition
2	Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
3	Plasma-assisted and thermal atomic layer deposition of electrochemically active Li₂CO₃

Li2CO3 Plasma Enhanced Atomic Layer Deposition Film Publications