Al Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Al films returned 4 record(s).

Number	Title
1	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
2	Study on the characteristics of aluminum thin films prepared by atomic layer deposition
3	Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
4	Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN