Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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CoN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing CoN films returned 2 record(s).

NumberTitle
1Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate
2In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films