Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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BeO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing BeO films returned 2 record(s).

NumberTitle
1Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
2Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition