SiCOH Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SiCOH films returned 3 record(s).

Number	Title
1	Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
2	Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
3	Carbon content control of silicon oxycarbide film with methane containing plasma