Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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SiCOH Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SiCOH films returned 3 record(s).

NumberTitle
1Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
2Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
3Carbon content control of silicon oxycarbide film with methane containing plasma