Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Cu-Mn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Cu-Mn films returned 1 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer