AlSi_xO_y Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing AlSi_xO_y films returned 6 record(s).

Number	Title
1	Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
2	Band offset of Al_1-xSi_xO_y mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
3	Composite materials and nanoporous thin layers made by atomic layer deposition
4	Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
5	Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
6	Nanoporous SiO₂ thin films made by atomic layer deposition and atomic etching

AlSixOy Plasma Enhanced Atomic Layer Deposition Film Publications