Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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TiSiO Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiSiO films returned 2 record(s).

NumberTitle
1Optical and Electrical Properties of TixSi1-xOy Films
2Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition