SiC_xN_y Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SiC_xN_y films returned 2 record(s).

Number	Title
1	SiC_xN_y-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition
2	Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature

SiCxNy Plasma Enhanced Atomic Layer Deposition Film Publications