SrTa₂O₆ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SrTa₂O₆ films returned 2 record(s).

Number	Title
1	Electrical properties of SrTa₂O₆ thin films by plasma enhanced atomic layer deposition (PEALD)
2	Plasma-Enhanced Atomic Layer Deposition of SrTa₂O₆ Thin Films Using Sr[Ta(OC₂H₅)₅(OC₂H₄OCH₃)]₂ as Precursor

SrTa2O6 Plasma Enhanced Atomic Layer Deposition Film Publications