Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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LiCoO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing LiCoO2 films returned 2 record(s).

NumberTitle
1Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
2Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries