Young's Modulus Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Young's Modulus returned 2 record(s).

Number	Title
1	Tribological properties of thin films made by atomic layer deposition sliding against silicon
2	Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO₂ Coating