Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Border Trap Densities, NBT Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Border Trap Densities, NBT returned 2 record(s).

NumberTitle
1Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
2The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces