Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Thermal Effusion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Thermal Effusion returned 2 record(s).

NumberTitle
1Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
2Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon