Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Coercive Field Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Coercive Field returned 1 record(s).

NumberTitle
1Sub-10-nm ferroelectric Gd-doped HfO2 layers