Oxygen Transmission Rate (OTR) Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Oxygen Transmission Rate (OTR) returned 3 record(s).

Number	Title
1	A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
2	Plasma-Assisted ALD of an Al₂O₃ Permeation Barrier Layer on Plastic
3	PEALD of SiO₂ and Al₂O₃ Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads