Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Midgap Voltage Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Midgap Voltage returned 3 record(s).

NumberTitle
1Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
2Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
3Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors