Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Mechanical Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Mechanical Properties returned 3 record(s).

NumberTitle
1Fabrication and deformation of three-dimensional hollow ceramic nanostructures
2The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain