Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Mechanical Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Mechanical Properties returned 3 record(s).

NumberTitle
1The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
2Fabrication and deformation of three-dimensional hollow ceramic nanostructures