Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Voltage Nonlinearity Factor Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Voltage Nonlinearity Factor returned 1 record(s).

NumberTitle
1Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films