Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Surface Hydroxyl Concentration Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Surface Hydroxyl Concentration returned 2 record(s).

NumberTitle
1Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
2Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy