Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Selectivity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Selectivity returned 2 record(s).

NumberTitle
1Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
2Topographically selective deposition