Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Pulsed Transient Current Measurement Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Pulsed Transient Current Measurement returned 1 record(s).

NumberTitle
1TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films