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Absorption Edges Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Absorption Edges returned 3 record(s).

NumberTitle
1The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
2ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
3Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes