About Plasma ALD, LLC

The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.

Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to a vacuum system can learn more on our Plasma Sources page.

Integrated Semiconductor/Catalyst Assemblies for Sustained Photoanodic Water Oxidation

Type:
Conference Proceedings
Info:
ECS Meeting Abstracts
Date:
2015-05-27

Author Information

Name Institution
Jinhui YangLawrence Berkeley National Laboratory
Jason K. CooperLawrence Berkeley National Laboratory
Francesca M. TomaLawrence Berkeley National Laboratory
Ian D. SharpLawrence Berkeley National Laboratory

Films

Plasma CoOx

Hardware used: Unknown

CAS#: 7782-44-7

Film/Plasma Properties

Characteristic: Unknown
Analysis: X-ray Absorption Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Unknown
Analysis: GIWAXS, Grazing Incidence Wide Angle X-ray Scattering

Characteristic: Unknown
Analysis: TEM, Transmission Electron Microscope

Substrates

Silicon

Notes

494