Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Highly efficient and bending durable perovskite solar cells: toward a wearable power source

Type:
Journal
Info:
Energy Environ. Sci., 2015, Advance Article
Date:
2014-10-03
DOI:
http://dx.doi.org/10.1039/C4EE02441A

Author Information

Name Institution
Byeong Jo KimSungkyunkwan University

Films

Plasma TiO2

Hardware used: Unknown
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 80C

Film/Plasma Properties

Substrates

Notes

PEALD TiO2 electron collection layer for flexible perovskite solar cells
256