Inductively coupled plasma sources from Plasma ALD, LLC.


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Vitaliy A. Guzenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Vitaliy A. Guzenko returned 2 record(s).

NumberTitle
1Systematic efficiency study of line-doubled zone plates
2Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses