Inductively coupled plasma sources from Plasma ALD, LLC.


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Gauthier Lefèvre Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gauthier Lefèvre returned 1 record(s).

NumberTitle
1Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches