Cristian Van Helvoirt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Cristian Van Helvoirt returned 5 record(s).

Number	Title
1	Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO₂
2	Temporal and spatial atomic layer deposition of Al-doped zinc oxide as a passivating conductive contact for silicon solar cells
3	Plasma-Assisted ALD for the Conformal Deposition of SiO₂: Process, Material and Electronic Properties
4	Comparative study of ALD SiO₂ thin films for optical applications
5	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies