Kazuhiro Hirahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kazuhiro Hirahara returned 4 record(s).

Number	Title
1	Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
2	RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
3	RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
4	Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon