B. J. Thibeault Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by B. J. Thibeault returned 3 record(s).

Number	Title
1	High Dielectric Constant ZrO₂ Films by Atomic Layer Deposition Technique on Germanium Substrates
2	Interfacial and electrical properties of Al₂O₃/HfO₂ bilayer deposited by atomic layer deposition on GeON passivated germanium surface
3	Structural and electrical properties of ultra-thin high-k ZrO₂ film on nitride passivated Ge(100) prepared by PEALD