Inductively coupled plasma sources from Plasma ALD, LLC.


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Malte Czernohorsky Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Malte Czernohorsky returned 1 record(s).

NumberTitle
1Pyroelectric and Ferroelectric Properties of Hafnium Oxide Doped with Si via Plasma Enhanced ALD