Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Biswarup Guha Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Biswarup Guha returned 1 record(s).

NumberTitle
1Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million