Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

D. Alamarguy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D. Alamarguy returned 1 record(s).

NumberTitle
1An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon