Fabien Piallat Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Fabien Piallat returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V |
| 2 | Evaluation of plasma parameters on PEALD deposited TaCN |