Ebisudani Taishi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ebisudani Taishi returned 2 record(s).

Number	Title
1	Engineering high quality and conformal ultrathin SiN_x films by PEALD for downscaled and advanced CMOS nodes
2	Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films