Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yu. B. Samsonenko Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu. B. Samsonenko returned 1 record(s).

NumberTitle
1Surface passivation of GaAs nanowires by the atomic layer deposition of AlN