Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Yoni Mehlman Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yoni Mehlman returned 1 record(s).

NumberTitle
1Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications